Speaker
Mr
Ralph Müller
(LMU)
Description
Novel developments in particle detector technology require fast and precise methods to measure large area topologies in the order of a few square meters.
A standard method is a tactile coordinate measurement system. With such a system resolutions of better 10 µm are achievable but with relatively long duration
of several hours for one cycle. Sensitive structures may be damaged.
We present a method using a non tactile laser distance sensor. Such a device is
able to scan surfaces very fast without touching the surface. The presented device
has a special measurement mode, enabling it to measure semitransparent surfaces.
The vertical translator to mount the sensor is able to move in sub mm steps. Using this we are able to measure the position and height of copper on FR4 with an
accuracy below 10 µm.
This technology can be used in nearly every field where a fast topology scan of
large areas is required.
We report on the performance of the sensor scaning non transparent as well as
semitransparent surfaces. This includes studies to minimise the measurement du-
ration without a loss in the resolution. Our method to calibrate our measurement
system will also be shown. This calibration is needed to reach a resolution below
10 µm.
Primary author
Mr
Ralph Müller
(LMU)
Co-authors
Prof.
Otmar Biebel
(LMU)
Dr
Otto Schaile
(LMU)
Dr
Ralf Hertenberger
(LMU)
