Speaker
Prof.
Hiroyuki Nishikawa
(Shibaura Institute of Technology, Japan)
Description
Dielectrophoresis (DEP) has been widely used as a technique for manipulation or trapping of micro particles and microbes such as E.coli for prevention of food poisoning diseases. We have previously reported the introduction of high-aspect-pillar arrays into DEP devices for improved trapping capability by modulating the electric field to enhance the DEP force to attract micro particles [1, 2].
In this study, we have developed flexible DEP devices on a plastic film equipped with high-aspect-pillar arrays by proton beam writing (PBW) for better convenience of the DEP device. The PBW was performed with a proton beam focused to 1.0 micro meter at beam energy of 1.0-1.7MeV using beamlines at the Center for Flexible System Integration, SIT and TIARA, JAEA Takasaki. The high-aspect-ratio pillar arrays were written and developed with a SU-8 resist layer on a flexible polyethylene terephthalate (PET) film. Improved convenience and trapping capability of the flexible DEP devices on PET films as an electric micro-filter will be demonstrated. Application of cleaning and drying techniques using supercritical CO2 (40 degree C and at 14 MPa) to avoid the collapse of the pillar arrays due to capillary force will be also discussed.
[1] Y. Furuta, H. Nishikawa, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida, Fabrication and evaluation of 3D-electric micro filters using proton beam writing, Microelectronic Engineering 86, (2009), pp.1396-1400.
[2] Y. Furuta, H. Nishikawa, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida, Applications of microstructures fabricated by proton beam writing to electric-micro filters, Nucl. Instr. Meth. Phys. Res. B 267 (2009), pp.2285–2288.
Primary author
Prof.
Hiroyuki Nishikawa
(Shibaura Institute of Technology, Japan)
Co-authors
Mr
Ginya Ayugase
(Shibaura Institute of Technology, Japan)
Mr
Hiroya Tokita
(Tokyo Metropolitan University, Japan)
Prof.
Satoshi Uchida
(Tokyo Metropolitan University, Japan)
Dr
Takahiro Satoh
(Japan Atomic Energy Agency, Japan)
Dr
Tomihiro Kamiya
(Japan Atomic Energy Agency, Japan)
Dr
Yasuyuki Ishii
(Japan Atomic Energy Agency, Japan)
