Conveners
Session 7 - 5th Proton Beam Writing Workshop
- Jeroen Anton van Kan (CIBA, Physics NUS)
Prof.
Jeroen Anton van Kan
(CIBA, Department of Physics, National University of Singapore, Singapore)
10/07/2014, 10:30
Invited Technical Oral Communication
Proton beam writing (PBW) is an ideal technique to fabricate lab-on-chip devices with features down to the nano scale. PBW exhibits low proximity effects coupled with the straight trajectory and even energy deposition its path will results in sidewall smoothness of a few nm RMS. The high penetration depth of the proton beam enables the production of high aspect ratio, high density 3D nano...
Prof.
Hiroyuki Nishikawa
(Shibaura Institute of Technology, Japan)
10/07/2014, 11:00
Invited Technical Oral Communication
Dielectrophoresis (DEP) has been widely used as a technique for manipulation or trapping of micro particles and microbes such as E.coli for prevention of food poisoning diseases. We have previously reported the introduction of high-aspect-pillar arrays into DEP devices for improved trapping capability by modulating the electric field to enhance the DEP force to attract micro particles [1, 2]....
Dr
Wataru Kada
(Gunma University, Maebashi City, Gunma, Japan)
10/07/2014, 11:30
Oral Communication
Proton beam writing (PBW) technique has capability to fabricate micro-optical devices which will be utilized in high-speed optical communications. In the previous study, we have demonstrated the fabrication of Mach-Zehnder (MZ) optical waveguide structures in poly-methyl-methacrylate (PMMA) [1]. The optical switch based on this MZ optical waveguide was successfully developed, however, results...
Mr
Saad Alshehri
(University of Surrey Ion Beam Centre, Advanced Technology Institute, U.K.)
10/07/2014, 11:50
Oral Communication
The proton beam writing (PBW) technique has significant advantages over other lithography techniques in the fabrication of three-dimensional structures with a high aspect ratio, straight and smooth sidewalls. These features potentially facilitate the rapid prototyping of microfluidic systems with some crucial improvements in the quality. A network of polymeric buried channels was fabricated in...
Dr
Robert Huszank
(Laboratory of Ion Beam Applications, Institute for Nuclear Research, Hungarian Academy of Sciences)
10/07/2014, 12:10
Proton Beam Writing
Oral Communication
To extend the applications of the proton beam writing (PBW) technique it is important to explore potential new resists materials. Poly(dimethyl-siloxane) (PDMS) is a promising material for many applications nowadays because of its advantageous properties. In cross-linked, elastomeric form it has been widely used to fabricate Micro-Electro-Mechanical Systems (MEMS), microfluidic devices,...
