Diamond has a broad field of applications due to their extraordinary properties like the pronounced thermal conduction and hardness. In mineral science the hardness is used at high pressure laboratories in diamond anvil cells (DACs). Here an intrinsic heater could be useful to generate high temperatures besides the high pressure. Furthermore diamond is one of the most prominent candidates for the realization of a quantum computer at room temperature via nitrogen vacancy (NV) color centres, where it is essential to control the charge state of the NV centres e.g. by electric fields [1,2].
The construction of micrometer scale intrinsic electric wires, coils or heaters in diamond by ion beam induced graphitization is a method to realize such devices directly under the surface [3].
For this reason diamond single crystals (optical grade, Element Six) were irradiated by 1.9 MeV focussed He+ particles at the LIPSION nanoprobe with a spot size of 3 µm. Graphitization was obtained for fluences between 1016 cm-2 to 1018 cm-2 and subsequently annealing [4]. As a consequence of the relatively high ion energy the created structures are located about 3 µm deep under the diamond surface and protected to their surroundings.
The scope of this study is the optimization and characterization of such structures for implementation in diamond devices without using a mask e.g. as micrometer-size heater for NV centre creation by build-in annealing or wires for charge state control of the fabricated centres. Different feed-trough processes between graphite layer and diamond surface for electrical contacts were investigated. First measurements of resistance and surface resistivity as well as ellipsometry were used.
[1] M. W. Doherty, N. B. Manson, P. Delaney, F. Jelezko, J. Wrachtrup, L. C.L. Hollenberg, Phys. Reports, Vol. 528, Iss. 1, 2013
[2] B. Grotz, M.V. Hauf, M. Dankerl, B. Naydenov, S. Pezzagna, J. Meijer, F. Jelezko, J. Wrachtrup, M. Stutzmann, F. Reinhard, J. A. Garrido, Nat. Commun., Vol. 3, No. 729, 2012
[3] P. Olivero, G. Amato, F. Bellotti, O. Budnyk, E. Colombo, M. Jakšić, C. Manfredotti, Ž. Pastuović, F. Picollo, N. Skukan, M. Vannoni, E. Vittone, Diamond and Related Materials, Vol. 18, Iss. 5–8, 2009
[4] C. Uzan-Saguy, C. Cytermann, R. Brener, V.Richter, M. Shaanan,.R. Kalish, Appl. Phys. Lett. , Vol.67, No.9, 1995