Speaker
Dr
Wataru Kada
(Gunma University, Maebashi City, Gunma, Japan)
Description
Proton beam writing (PBW) technique has capability to fabricate micro-optical devices which will be utilized in high-speed optical communications. In the previous study, we have demonstrated the fabrication of Mach-Zehnder (MZ) optical waveguide structures in poly-methyl-methacrylate (PMMA) [1]. The optical switch based on this MZ optical waveguide was successfully developed, however, results indicated that enhancement in optical transmittance of the MZ waveguide structures is required for the actual applications. On the other hand, interests on optical properties of poly-dimethyl-siloxane (PDMS) has been emerged as a potential candidate for such micro-optical devices [2].
In this study, we have demonstrated embedded MZ optical waveguide fabrication on PDMS by precise control of scanning proton microbeam probe and mechanical sample-stage. PDMS films (Toray Dow Corning SYLGARD184) were formed on a silicon wafer (40 mm× 20 mm × 0.5 mm) by spin-coat process with thickness of approximately 30 μm. 750 keV proton microbeam probe was employed to fabricate embedded optical waveguide structure in the PDMS films with the depth of 18 μm. Embedded MZ waveguides were fabricated with different beam fluence from 40 nC/mm² to 100 nC/mm² and evaluated by 1.55 μm fibre-laser irradiation with different light propagation conditions. The results indicated that embedded structure in PDMS films have successfully equipped single-mode light propagations.
Reference
[1] K. Miura, H. Kiryu, Y. Ozawa, A. Kubota, Y. Hiratani, O. Hanaizumi, T. Satoh, Y. Ishii, M. Kohka, K. Takano, T. Ohkubo, A. Yamazaki, W. Kada, A. Yokoyama, and T. Kamiya, “Demonstration of thermo-optic switch consisting of Mach-Zehnder polymer waveguide drawn using focused proton beam”, Key Engineering Materials, 596 (2014) 134.
[2] K. Saito, H. Hayashi, and H. Nishikawa, “Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates”, Nucl. Instr. and Meth. B, 306 (2013) 284.
Primary author
Dr
Wataru Kada
(Gunma University, Maebashi City, Gunma, Japan)
Co-authors
Mr
Atsushi Kubota
(Gunma University, Maebashi City, Gunma, Japan)
Mr
Hijiri Kato
(Shibaura Institute of Technology, Koto, Tokyo, Japan)
Prof.
Hiroyuki Nishikawa
(Shibaura Institute of Technology, Koto, Tokyo, Japan)
Dr
Kenta Miura
(Gunma University, Maebashi City, Gunma, Japan)
Mr
Masashi Koka
(Japan Atomic Energy Agency, Tokai, Naka District, Japan)
Dr
Osamu Hanaizumi
(Gunma University, Maebashi City, Gunma, Japan)
Mr
Ryota Saruya
(Gunma University, Maebashi City, Gunma, Japan)
Dr
Takahiro Satoh
(Japan Atomic Energy Agency, Tokai, Naka District, Japan)
Dr
Tomihiro Kamiya
(Japan Atomic Energy Agency, Tokai, Naka District, Japan)
Dr
Yasuyuki Ishii
(Japan Atomic Energy Agency, Tokai, Naka District, Japan)
