Speaker
Dr
Gerhard Randers-Pehrson
(Columbia University, USA)
Description
We are planning to install a sub-100 nanometer single-cell irradiator at RARAF of Columbia University. It will consist of an electrostatic multiplet first stage and a superconducting solenoid final lens. In this paper I will discuss the various design calculations and expected performance of the system. Extensive ray-tracing calculations including grid-shadow studies will be reported leading to an optimized system with well understood intrinsic aberrations and potential parasitic ones.
Primary author
Dr
Gerhard Randers-Pehrson
(Columbia University, USA)
