14th International Conference on Nuclear Microprobe Technology and Applications

Development of microbeam technology to expand its applications at TIARA

8 Jul 2014, 08:30

30m

Auditorium (Centro Culturale San Gaetano)

Invited Technical Oral Communication Session 1 - Nuclear Microprobe Technology 1

Speaker

Dr Tomihiro Kamiya (Japan Atomic Energy Agency (JAEA), Japan)

Description

R&Ds of ion microbeam technology have been progressed at TIARA facility since 1990. In order to expand the variety of ion beam applications of analysing, and fabricating mesoscopic scale system, we have been developing three different types of ion microbeam systems connecting to the 3-MV single-ended accelerator, 3-MV tandem and AVF-Cyclotron (K=110) [1]. For micro-analyses, other than the micro-PIXE system, a micro-PIGE (Particle Induced Gamma-ray Emission) and a micro-IBIL (Ion Beam Induced Luminescence) [2] was also established on the light ion microbeam system, so as to expand the object of analyses to lighter elements, such as lithium, boron or fluoride, and also to the chemical bonding state between elements, respectively. For micro-fabrication, other than the standard PBW, techniques of mask-less patterning on materials without etching processes were studied aiming at development of optical, magnetic or other new types of micro-devices on the light-ion microbeam system [3-5]. For single-ion-hit technique, it was required to monitor every individual ion injection in real time, so as to improve the reliability and also the efficiency of the ion irradiation to living biological cells or semiconductor micro-devices. The method using a highly efficient scintillator and a high sensitivity camera has been developed [6], in addition the study on a method using thin film type particle detector has been started by international collaboration [7]. In this paper, the latest progress of the ion microbeam technology and applications at TIARA are summarised and a future prospect of them is discussed. Acknowledgements This work was partly supported by Quantum Beam Technology Program of the Ministry of Education, Culture, Sports, Science and Technology, Japan, and was supported in part through the project under the Strategic Japanese-Croatian Cooperative Program on Materials Science of the Japan Science and Technology Agency and the Ministry of Science, Education and Sports of the Republic of Croatia. References [1] T.Kamiya, et al, Nucl. Inst. Meth. B269 (2011) 2184-2188. [2] W.Kada, et al, Nucl. Inst. Meth. B318 (2014) 42-46. [3] K.Miura, et al, Key Engineering Materials 596 (2014) 134-138. [4] K.Aikoh, et al, J. Synchrotron Rad. 19 (2012) 223–226. [5] A.Kitamura, et al, Nucl. Instrum. Methods Phys. Res. B314 (2013) 82-85. [6] T.Satoh, et al, Nucl. Inst. Meth. B, in press. [7] V.Grilj, et al, Appl. Phys. Lett. 103 (2013) 243106-1-4.