Jul 22 – 26, 2019
Europe/Rome timezone

Development of Vacuum-Gap Capacitor Kinetic Inductance Detectors

Jul 24, 2019, 10:00 AM
Auditorium G. Testori (Milano)

Auditorium G. Testori


Piazza Città di Lombardia, 1, 20124 Milano MI
Oral Presentation Low Temperature Detector fabrication techniques and materials Orals LM 003


Dr Faouzi Boussaha (GEPI, Paris Observatory)


We report on the implementation of vacuum parallel-plate capacitor MKIDs for astronomical applications. MKIDs features an intrinsic excess noise probably due to the two-level systems (TLS) generated at metal/dielectric interface, particularly when dielectrics are amorphous, as well as in the bulk substrate. To attempt to reduce TLS, several groups are intensively investigating the use of monocrystalline silicon [1], a-SiNx:H [2] or SiNx dielectrics which can feature low amount of defects. However, these would not guarantee a substantial gain in performance. The ideal solution is likely the use of capacitors without dielectrics as TLS would be predominant in this part of resonator. In this paper, we will present the performance of first vacuum parallel plate capacitor MKIDs implemented using a straightforward fabrication process that allowed to achieve resonators with internal quality factors of 2-4×10^5.

[1] S. J. Weber, K. W. Murch, D. H. Slichter, R. Vijay, and I. Siddiqi, "Single crystal silicon capacitors with low microwave loss in the single photon regime," Appl. Phys. Lett. 98, 172510 (2011).
[2] H. Paik and K. D. Osborn, "Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits," Appl. Phys. Lett. 96, 072505 (2010).

Student (Ph.D., M.Sc. or B.Sc.) N
Less than 5 years of experience since completion of Ph.D N

Primary authors

Dr Faouzi Boussaha (GEPI, Paris Observatory) Samir BELDI (GEPI, Observatoire de Paris, PSL Université, CNRS, 75014 Paris – France) Alessandro Monfardini (Université Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, 38000 Grenoble, France) Dr Jie Hu (3Université Sorbonne Paris Cité Laboratoire APC-PCCP Université Paris Diderot, Paris, France) Florence Levy-Bertrand (Université Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, 38000 Grenoble, France) Dr Alessandro Traini (APC, University Paris Diderot) Thibaut Vacelet (Observatoire de Paris) Martino Calvo (Université Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, 38000 Grenoble, France) Christine Chaumont (GEPI - Observatoire de Paris) Prof. Michel Piat (APC, University Paris Diderot)

Presentation materials