Oct 8 – 10, 2018
INFN - Laboratori Nazionali di Legnaro
Europe/Rome timezone

Energetic Condensation For The Mitigation Of Nb/Cu Q-Slope

Oct 8, 2018, 12:00 PM
Villi Room (INFN - Laboratori Nazionali di Legnaro)

Villi Room

INFN - Laboratori Nazionali di Legnaro

Viale dell'Università 2, Legnaro (Padova) - Italy
Nb thin film technology Nb film technology & RF performance


Dr Anne-Marie Valente-Feliciano (Jefferson Lab)


With the development of energetic vacuum deposition techniques, high quality Nb films have been produced supporting the promise of high RF performance. In energetic condensation, the controlled incoming ion energy enables a number of processes such as desorption of adsorbed species, enhanced mobility of surface atoms and sub-implantation of impinging ions, thus producing improved film structures at lower process temperatures. Significant progress has been made in recent years in using ion energy and thermal energy provided during growth to influence the nucleation, structure and material quality of Nb films. By decoupling the film-substrate interface, nucleation and subsequent growth, one can create a favorable template for optimising the final surface exposed to SRF fields. Films deposited by HiPIMS (high power impulse magnetron sputtering) and ECR (electron cyclotron resonance) plasma show promise in improved superconducting and RF behavior compared to magnetron sputtered Nb films. This contribution presents the ongoing efforts at JLab to optimize energetic condensation Nb/Cu films for RF Q-slope mitigation.

Primary author


Dr Ari Palczewski (JLAB) Dr Charles Reece (Jefferson Lab) Dr Larry Phillips (JLAB) Dr Marco Arzeo (CERN) Dr Matthew Burton (JLAB) Mrs Sarah Aull (Comet AG)

Presentation materials