Transition edge sensors (TES) exhibiting high energy resolution of a single optical photon have been applied to photon-counting microscopy for biological imaging1. We are aiming to develop multi device TES showing large effective area in order to improve measurement efficiency of photon-counting microscopy. We fabricated 3×3 array TES where single device exhibits dimension of 8 µm×8 µm and film thickness of Ti 20 nm and Au 10 nm on Si substrate as shown in Fig. 1 (a). It must be checked whether each device in array TES on Si without membrane structures which keep thermally each device away operates independently or not. At first, we operated the device A and B in Fig. 1 (a) at once to obtain P-V curve of the device A as shown in Fig. 1 (b) PB = 52 pW. Joule power of the device A at 2 devices operating stayed about the same as that at single device operating, PB = 0 pW. Next, we operated the device A and B at once so that power of the device B equaled the sum of power of the 8 devices next to the device A instead of the 9 devices operating at once to obtain P-V curve of device A as shown in Fig. 1 (b) PB = 470 pW. Although joule power of the device A at PB = 470 pW was smaller than that at PB = 0 pW by 21%, electro thermal feedback on the device A at PB = 470 pW worked. Static thermal influence from neighbor devices was revealed. Dynamic thermal crosstalk is investigated by measurement of signal response.
1 K. Niwa et al., Sci. Rep., 7, 45660 (2017).
|Student (Ph.D., M.Sc. or B.Sc.)||N|
|Less than 5 years of experience since completion of Ph.D||Y|