Silicon oxide, nitride and oxynitride films as dielectric materials for superconducting detector applications

25 Jul 2019, 17:45
1h 15m
Piazza Città di Lombardia (Milano)

Piazza Città di Lombardia

Milano

Piazza Città di Lombardia, 1, 20124 Milano MI
Poster Low Temperature Detector fabrication techniques and materials Poster session

Speaker

Ms Marharyta Lisovenko (Materials Science Division, Argonne National Laboratory)

Description

Modern Cosmic Microwave Background (CMB) detectors are planar superconducting devices that employ striplines for the millimeter radiation transfer from a coupling antenna to a power readout Transition Edge Sensor (TES), as well as in-line filters to define the bandpass. Quality of dielectric materials separating signal lines and ground plane are crucial to determine yield of the fabrication process and the on-sky detector performance. Here we present the characterization of silicon oxide, nitride and oxynitride thin film dielectrics using XRD, SEM and AFM techniques. The samples were synthesized by using a variety of reactive physical vapor deposition methods, including DC, RF and high-impulse power magnetron sputtering. While the composition was controlled by adjusting the ratio between the working (Ar) and reactive (O2 and N2) gases, the films morphology and structure varied with deposition pressure, and RF bias on the sample stage. Then, these materials were patterned into superconducting (Nb) resonant structures consisting of planar spiral inductors and parallel-plate capacitors. Measurements of the megahertz resonant frequencies and Q-factor were made using custom signal generation and processing FPGA electronics. The results of these tests and optimized sputtering process for reduced dielectric loss in CMB detector fabrication will be discussed.

Acknowledgments
Work at Argonne, including use of the Center for Nanoscale Materials, was supported by the U.S. Department of Energy, Office of Science, Offices of High Energy Physics, and Basic Energy Sciences, under Contract No. DE-AC02-06CH11357.

Less than 5 years of experience since completion of Ph.D Y
Student (Ph.D., M.Sc. or B.Sc.) Y

Primary authors

Ms Marharyta Lisovenko (Materials Science Division, Argonne National Laboratory) Ms Margaret Panetta (Department of Physics, University of Chicago)

Co-authors

Dr Pete Barry (High Energy Physics Division, Argonne National Laboratory) Dr Amy Bender (High Energy Physics Division, Argonne National Laboratory) Dr Thomas Cecil (High Energy Physics Division, Argonne National Laboratory) Dr Clarence Chang (High Energy Physics Division, Argonne National Laboratory) Dr Ralu Divan (Center for Nanoscale Materials, Argonne National Laboratory) Dr Steve Kuhlmann (High Energy Physics Division, Argonne National Laboratory) Dr Amy Lowitz (Kavli Institute for Cosmological Physics, University of Chicago) Ms Suzanne Miller (Center for Nanoscale Materials, Argonne National Laboratory) Dr Valentine Novosad (Materials Science Division, Physics Division, Argonne National Laboratory) Dr Stephen Padin (High Energy Physics Division, Argonne National Laboratory) Mr John Pearson (Materials Science Division, Argonne National Laboratory) Dr Gensheng Wang (High Energy Physics Division, Argonne National Laboratory) Dr Volodymyr Yefremenko (High Energy Physics Division, Argonne National Laboratory)

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