Speaker
Dr
Eduard Driessen
(IRAM)
Description
We describe the fabrication of homogeneous sub-stoichiometric
titanium nitride films for microwave kinetic inductance detector (KID) arrays. Using a 6” sputtering target and a homogeneous nitrogen inlet, the variation of the critical temperature over a 2” wafer was reduced to <25 %. Measurements of a 132-pixel KID array from these films reveal a sensitivity of 16 kHz/pW in the 100 GHz band, comparable to the best aluminium
KIDs. We measured a noise equivalent power of NEP = 3.6×10-15 W/sqrt(Hz). Finally, we describe possible routes to further improve the performance of these TiN KID arrays
Primary author
Dr
Eduard Driessen
(IRAM)
Co-authors
Dr
Alessandro Monfardini
(CNRS Grenoble)
Dr
Gregoire Coiffard
(UCSB)
Dr
Johannes Goupy
(CNRS)
Dr
Karl Schuster
(IRAM)
Dr
Martino Calvo
(Institut Néel - CNRS Grenoble)
Prof.
Stephane Pignard
(LMGP, Univ. Grenoble Alpes)
