Technology aspects in constructing the basic components of MPGD

by Rui De Oliveira (CERN)

Tuesday 11 Nov 2014, 15:35 → 15:55 Europe/Rome

Aula Bruno Touschek (LNF INFN)

Since 1996 the CERN PCB workshop is producing components for MPGD detectors. Many MPGD were born in this workshop , GEM in 1996 , Bulk Micromegas in 2004 , Micro BULK in 2011 . To build such detectors , technologies being able to produced parts having features size in between nanometric (Wafer Fab) and millimetric (traditional mechanics) are necessary. In the CERN PCB workshop the micrometric 3D structures in metal or dielectrics are mainly produced by anisotropic chemical etching.Laser and Plasma etching are also slowly entering in the list of tools to produce MPGDs. All the existing technologies used at the CERN PCB workshop will be presented and an overview of future technologies and possible application for detector production will be given.