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The seminar provides an overview on selected applications in the field of micromachining using ultrashort pulse lasers at our research centre. The focus of the presentation will be on the fabrication of piezoelectric actuators as used for biaxial strain-tuning of quantum emitters. In particular, the latest research progress in the development of a new generation of thinned and miniaturised piezoelectric actuators will be presented. These promising results suggest that it is potentially possible to achieve comparable strain performances with more compact devices. This would represent an important step towards higher integration density.
Rinaldo Trotta