Speaker
Description
See full abstract here http://ocs.ciemat.es/EPS2019ABS/pdf/P5.3008.pdf
This study describes the specification, design and fabrication technology of the modified source spectrum filter for the combination of deuterium and halogen lamps light source system. The filter is modified and eliminated. The resulting Alpha deuterium line produces a smoother spectrum of light sources over a wide range of wavelengths. The filter will be simulated to obtain a better tolerance for film thickness, and the multilayer film coated by ion source assisted electron beam evaporation for processing, with automatic optical monitoring system to control the thickness, and control the each film layer thickness precisely. The corresponding optical and mechanical properties of multilayer optical thin film were investigated by in-situ optical monitoring, spectrometer, ellipsometry, and Scanning Electron Microscope(SEM).
