Speaker
Description
See full abstract here:
http://ocs.ciemat.es/EPS2019ABS/pdf/P4.4005.pdf
The skin effect is the basic mechanism which governs the distribution of the electromagnetic field as well as of electron heating and power absorption in the ICP plasma. Recent interest in ICPs operating at low gas pressure (0.1-50 mTorr) has prompted intensive studies of the anomalous skin effect - mechanisms of the screening of the penetrated electromagnetic field, anomalous power absorption and electron heating due to the resonant interaction of the wave with thermal electrons in the low pressure collisionless plasma. In spite of the great progress in the investigations of the ICP plasma sources in the regimes corresponding to the anomalous skin effect, there are numerous experimental results which reveal that plasma heating by the external high frequency electric fields and power absorption was unexpectedly intensive and exceed the predictions of the existing theory of the anomalous skin effect.
We found that the observed anomalously strong power absorption and heating of electrons originate from the short-scale instabilities of the parametric type which are excited by the oscillating current formed by the oscillatory motion of electrons relative to the practically immobile ions. In our report we present the linear and nonlinear theory of the parametric instabilities which develop in the skin layer and of the resulted anomalous electron heating and anomalous absorption of the pumping wave.
