Speaker
Description
See full abstract here:
http://ocs.ciemat.es/EPS2019ABS/pdf/P2.3013.pdf
Ferromagnetic enhanced inductively coupled plasma sources (FMICP) are considered to be a
promising solution to produce large volumes of dense (~1012 cm-3) uniform plasma for largearea
(450 mm) plasma processing systems, due to a high power transfer efficiency, reduced
driving frequency (<0.4 MHz), the absence of capacitive coupling and a low plasma potential
[1]. Although the properties of large-scale FMICP sources are well investigated for the case
of inert gases [1–4], the impact of halogens addition on the FMICP characteristics is still
unknown. To investigate the plasma parameters of a large-scale FMICP in Cl2/Ar mixture, an
experimental setup has been developed. The scheme of the setup is similar to that of
[2], except of the ferrite antennas construction (which are optimized for higher voltage
operation), gas discharge chamber size and the construction of U-shaped gas discharge tubes
(which are adapted for high heat loads). New experimental data have been obtained on the
dependence of FMICP electric field strength vs. gas pressure (10–100 mTorr), discharge
current (5–20 A) and Cl2 content. The impact of Cl2 addition on the electrical characteristics
of large-scale FMICP was analyzed and compared with the properties of RF and DC
discharges in Ar/Cl2 mixture.
References
[1] Godyak V 2013 Journal of Physics D: Applied Physics 46 283001
[2] Kyeonghyo Lee, Youngkwang Lee, Sungwon Jo et al. 2008 Plasma Sources Sci. Technol. 17 015014 [3] Jin-Young Bang, Jin-Yong Kim and Chin-Wook Chung 2011 Physics of Plasmas 18 073507
[4] Hyun Jun Kim, Hye-Ju Hwang, Dong Hwan Kim et al. 2015 Journal of Applied Physics 117 153302 The work is supported by the Russian Science Foundation, Grant No. 18–19–00205.
