We report on the development of commercially fabricated multi-chroic antenna coupled Transition Edge Sensor (TES) bolometer arrays for Cosmic Microwave Background (CMB) polarimetry experiments. The orders of magnitude increase in detector count for next generation CMB experiments require a new approach in detector wafer production to increase fabrication throughput.
We describe collaborative efforts with a commercial superconductor electronics fabrication facility (SeeQC-HYPRES, Inc.) to fabricate antenna coupled TES bolometer detectors. We have successfully fabricated an operational dual-polarization, dichroic sinuous antenna-coupled TES detector array on a 150 mm diameter wafers. The fabricated detector array has yields of over 96% and excellent uniformity across the wafer. We have also demonstrated stable detector performance over 4 months. Both RF characteristics and TES bolometer properties are suitable for CMB observations. We successfully fabricated different types of TES bolometers optimized for frequency-multiplexing readout, time-domain multiplexing readout, and microwave SQUID multiplexing readout. We discuss the motivation, design considerations, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.
|Less than 5 years of experience since completion of Ph.D||N|
|Student (Ph.D., M.Sc. or B.Sc.)||N|