Speaker
Dr
Lionel Presmanes
(CIRIMAT, Université de Toulouse)
Description
In this work Ga doped ZnO thin films have been deposited by RF magnetron sputtering onto a silicon micro-hotplate and their structural, microstructural and gas sensing properties have been studied. ZnO:Ga thin film with a thickness of 90 nm has been deposited onto a silicon based micro-hotplates without any photolithography process thanks to a low cost and reliable stencil mask process. Sub-ppm sensing (500 ppb) of NO2 gas at low temperature (50 °C) has been obtained with promising responses R/R0 up to 18.
Primary author
Dr
Lionel Presmanes
(CIRIMAT, Université de Toulouse)
Co-authors
Dr
V. Gunasekaran
(CIRIMAT, Université de Toulouse)
Dr
Y. Thimont
(CIRIMAT, Université de Toulouse)
Dr
I. Sinnarasa
(CIRIMAT, Université de Toulouse)
Dr
A. Sinnarasa
(CIRIMAT, Université de Toulouse)
Dr
Ph. Tailhades
(CIRIMAT, Université de Toulouse)
Dr
F. Blanc
(CIRIMAT, Université de Toulouse)
Dr
C. Talhi
(LAAS-CNRS, Université de Toulouse)
Dr
Ph. Menini
(LAAS-CNRS, Université de Toulouse)
