Seminars

Accelerators in CMOS semiconductor industry: overview, applications and practical examples

by D. Martirani, G. Margutti

Europe/Rome
Aula Rasetti (Dip. di Fisica - Edificio G. Marconi)

Aula Rasetti

Dip. di Fisica - Edificio G. Marconi

Description
Modern semiconductor industry makes use of accelerator to modify electrical characteristic of silicon. Such machines  are specifically adapted to accelerate ionized atoms or molecules and are thus called Ion Implanters.
Typical usage of ion implanters and their working principle will be given in this seminar, including an overview of main components of the most common  models.  Main processes and related issues, together with metrology techniques for process monitoring and characterization will be also covered, aiming to complete the picture of the utilization of accelerator in a CMOS silicon factory.